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Air-bearing spindle for wafer dicing

Air flotation bearing

SUND

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Product Details

  • Maximum speed 60000 rpm.
  • Supported by high-performance air static pressure bearings, it has extremely high dynamic rotational accuracy. The spindle rotational accuracy is less than 1um, and the tool holder positioning accuracy is less than 1um.
  • Driven by a three-phase AC permanent magnet synchronous motor (brushless DC), the shaft vibration speed is 0.3mm/s.
  • The spindle is equipped with a pneumatic locking function, making it convenient to change grinding wheels.
  • The spindle uses a hanging installation method, suitable for 6-inch wafer dicing machines.
  • The spindle is equipped with a signal output that is in real-time communication with the shaft core, which can meet the requirements of the equipment height measurement system.

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